Vtech (VT-ER) range is dedicated to ion assisted deposition processes, where the degree of plasma impact on the growing film can be automatically varied by in-situ changing of the magnetic field.įerromagnetic (HS) and (Loop) sputtering options for up to 6mm Nickel and 2mm Iron by (HS) magnetics or custom magnetic arrangement to suit ferromagnetic materials in Gencoa (Loop) magnetics.
Using specially-designed thick profiled targets and high water flows, the MZ range can increase the machine up-time by 100%. Metallizer (MZ) range is designed for high-rate metallizing of webs, car parts and decorative applications. High Yield (HY) range achieve 40% target utilization and are recommended for applications where increased machine up-time or reduced material costs are required. An OEM proprietary magnetron design and manufacture service is also offered. Depending on the application, Gencoa can configure individual cathodes to meet specific process requirements and limitations.
All sources incorporate flange plate cooling as standard. A unique design incorporating zero-height anodes prevent short circuits during processes and reduce dust and defects in the coatings. Gencoa sources are configured with various power options such as DC, pulsed-DC, RF (up to 30kW) and HiPIMS. Direct cooling is achievable with removal of the diaphragm. All cathodes are fitted with a diaphragm type cooling for high power operation without breaking a water seal during target changeover.
The integrated gas delivery system acts as a powerful mechanism for tuning deposition uniformity by employing single or multi-zone control. Careful attention is given to ensuring a long-life, trouble-free operation and excellent target use. Gencoa have a well-established track record of providing critical components and technology for coating flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. Gencoa planar rectangular magnetrons combine low ownership cost, robust design and highly-optimized magnetics to produce a reliable product delivering high performance.
0 kommentar(er)
